====== H (2000) into Layer 1                    =======
        SRIM-2013.00
==================================================
      ION and final RECOIL ATOM Distributions     
 See  SRIM Outputs\TDATA.txt for calculation details
==================================================
See file :  SRIM Outputs\TDATA.txt   for details of calculation
 Ion    =  H   Energy = 3000  keV
============= TARGET MATERIAL ======================================
Layer  1 : Layer 1
Layer Width =     5.E+05 A   Layer # 1- Density = 8.481E22 atoms/cm3 = 7.865 g/cm3
  Layer # 1- Fe = 100  Atomic Percent = 100  Mass Percent
====================================================================
 Total Ions calculated =20000.00
 Ion Average Range =   350.1E+03 A   Straggling =   915.6E+01 A
 Ion Lateral Range =   188.8E+02 A   Straggling =   253.0E+02 A
 Ion Radial  Range =   295.1E+02 A   Straggling =   197.0E+02 A
====================================================================
 Transmitted Ions =;  Backscattered Ions =2
 (These are not included in Skewne- and Kurtosis below.)

 Range Skewne- = -015.1107  &= [-(X-Rp)^3]/[N*Straggle^3]
 Range Kurtosis = 363.0051  &= [-(X-Rp)^4]/[N*Straggle^4]
 Statistical definitions above are those used in VLSI implant modelling.
====================================================================
=================================================================
  Table Distribution Units are >>>  (Atoms/cm3) / (Atoms/cm2)  <<<  
=================================================================
   DEPTH          H       Recoil     
   (Ang.)       Ions     Distribution
-----------  ----------  ------------
500001.E-02  1.0000E+00  2.3340E+03
100000.E-01  0.0000E+00  2.6880E+03
150000.E-01  0.0000E+00  3.3060E+03
200000.E-01  1.0000E+00  2.3580E+03
250000.E-01  0.0000E+00  3.0280E+03
300000.E-01  0.0000E+00  2.4130E+03
350000.E-01  0.0000E+00  3.3120E+03
400000.E-01  0.0000E+00  2.7880E+03
450000.E-01  0.0000E+00  4.8920E+03
500000.E-01  0.0000E+00  2.0830E+03
550000.E-01  0.0000E+00  3.0500E+03
600000.E-01  0.0000E+00  3.6700E+03
650000.E-01  1.0000E+00  2.8980E+03
700000.E-01  0.0000E+00  3.7050E+03
750000.E-01  1.0000E+00  2.9600E+03
800000.E-01  0.0000E+00  3.7580E+03
850000.E-01  0.0000E+00  3.3480E+03
900000.E-01  2.0000E+00  2.5460E+03
950000.E-01  0.0000E+00  3.5190E+03
100000.E+00  1.0000E+00  3.6110E+03
105000.E+00  0.0000E+00  3.1620E+03
110000.E+00  0.0000E+00  4.4560E+03
115000.E+00  0.0000E+00  2.3300E+03
120000.E+00  0.0000E+00  3.3430E+03
125000.E+00  0.0000E+00  2.8740E+03
130000.E+00  0.0000E+00  5.0900E+03
135000.E+00  1.0000E+00  5.3620E+03
140000.E+00  0.0000E+00  3.3530E+03
145000.E+00  0.0000E+00  3.8150E+03
150000.E+00  1.0000E+00  5.2870E+03
155000.E+00  0.0000E+00  3.9720E+03
160000.E+00  0.0000E+00  6.2050E+03
165000.E+00  1.0000E+00  5.4010E+03
170000.E+00  0.0000E+00  3.6630E+03
175000.E+00  1.0000E+00  4.0540E+03
180000.E+00  0.0000E+00  4.2020E+03
185000.E+00  1.0000E+00  4.4600E+03
190000.E+00  0.0000E+00  6.1710E+03
195000.E+00  1.0000E+00  3.8070E+03
200000.E+00  0.0000E+00  3.9960E+03
205000.E+00  0.0000E+00  4.1310E+03
210000.E+00  1.0000E+00  4.4760E+03
215000.E+00  2.0000E+00  5.1530E+03
220000.E+00  3.0000E+00  4.5520E+03
225000.E+00  2.0000E+00  3.8050E+03
230000.E+00  4.0000E+00  5.0660E+03
235000.E+00  1.0000E+00  5.9460E+03
240000.E+00  1.0000E+00  8.2910E+03
245000.E+00  1.0000E+00  5.8010E+03
250000.E+00  3.0000E+00  4.6910E+03
255000.E+00  1.0000E+00  7.7150E+03
260000.E+00  1.0000E+00  7.5870E+03
265000.E+00  5.0000E+00  8.5020E+03
270000.E+00  2.0000E+00  6.0370E+03
275000.E+00  3.0000E+00  7.0340E+03
280000.E+00  6.0000E+00  7.3540E+03
285000.E+00  8.0000E+00  8.9790E+03
290000.E+00  8.0000E+00  9.4440E+03
295000.E+00  7.0000E+00  8.2310E+03
300000.E+00  1.0000E+01  1.0245E+04
305000.E+00  1.7000E+01  1.0060E+04
310000.E+00  2.1000E+01  1.2243E+04
315000.E+00  2.8000E+01  1.1069E+04
320000.E+00  4.4000E+01  1.1790E+04
325000.E+00  4.5000E+01  1.2395E+04
330000.E+00  7.2000E+01  1.7260E+04
335000.E+00  1.3200E+02  2.0457E+04
340000.E+00  2.6200E+02  2.4171E+04
345000.E+00  8.3900E+02  3.9036E+04
350000.E+00  4.2090E+03  8.3919E+04
355000.E+00  1.3654E+04  1.0598E+05
360000.E+00  5.9400E+02  1.8410E+03
365000.E+00  0.0000E+00  0.0000E+00
370000.E+00  0.0000E+00  0.0000E+00
375000.E+00  0.0000E+00  0.0000E+00
380000.E+00  0.0000E+00  0.0000E+00
385000.E+00  0.0000E+00  0.0000E+00
390000.E+00  0.0000E+00  0.0000E+00
395000.E+00  0.0000E+00  0.0000E+00
400000.E+00  0.0000E+00  0.0000E+00
405000.E+00  0.0000E+00  0.0000E+00
410000.E+00  0.0000E+00  0.0000E+00
415000.E+00  0.0000E+00  0.0000E+00
420000.E+00  0.0000E+00  0.0000E+00
425000.E+00  0.0000E+00  0.0000E+00
430000.E+00  0.0000E+00  0.0000E+00
435000.E+00  0.0000E+00  0.0000E+00
440000.E+00  0.0000E+00  0.0000E+00
445000.E+00  0.0000E+00  0.0000E+00
450000.E+00  0.0000E+00  0.0000E+00
455000.E+00  0.0000E+00  0.0000E+00
460000.E+00  0.0000E+00  0.0000E+00
465000.E+00  0.0000E+00  0.0000E+00
470000.E+00  0.0000E+00  0.0000E+00
475000.E+00  0.0000E+00  0.0000E+00
480000.E+00  0.0000E+00  0.0000E+00
485000.E+00  0.0000E+00  0.0000E+00
490000.E+00  0.0000E+00  0.0000E+00
495000.E+00  0.0000E+00  0.0000E+00
500000.E+00  0.0000E+00  0.0000E+00
