====== Xe (10) into Layer 1                     =======
        SRIM-2013.00
==================================================
      ION and final RECOIL ATOM Distributions     
 See  SRIM Outputs\TDATA.txt for calculation details
==================================================
See file :  SRIM Outputs\TDATA.txt   for details of calculation
 Ion    = Xe   Energy = 3000  keV
============= TARGET MATERIAL ======================================
Layer  1 : Uranium oxide (ICRU-670)
Layer Width =     1.E+04 A   Layer # 1- Density = 7.339E22 atoms/cm3 = 10.97 g/cm3
  Layer # 1-  U = 33.3 Atomic Percent = 88.1 Mass Percent
  Layer # 1-  O = 66.6 Atomic Percent = 11.8 Mass Percent
====================================================================
 Total Ions calculated =8000.00
 Ion Average Range =   521.2E+01 A   Straggling =   195.5E+01 A
 Ion Lateral Range =   153.5E+01 A   Straggling =   193.2E+01 A
 Ion Radial  Range =   241.8E+01 A   Straggling =   127.5E+01 A
====================================================================
 Transmitted Ions =;  Backscattered Ions =43
 (These are not included in Skewne- and Kurtosis below.)

 Range Skewne- = -000.1748  &= [-(X-Rp)^3]/[N*Straggle^3]
 Range Kurtosis = 002.6168  &= [-(X-Rp)^4]/[N*Straggle^4]
 Statistical definitions above are those used in VLSI implant modelling.
====================================================================
=================================================================
  Table Distribution Units are >>>  (Atoms/cm3) / (Atoms/cm2)  <<<  
=================================================================
   DEPTH         Xe          U          O    
   (Ang.)       Ions     Tgt. Atoms  Tgt. Atoms
-----------  ----------  ----------  ----------
120010.E-03  7.2917E+02  4.3149E+07  1.2748E+08
240010.E-03  1.4583E+03  5.9192E+07  1.7321E+08
360010.E-03  1.6667E+03  6.6677E+07  1.9860E+08
480010.E-03  1.5625E+03  6.9505E+07  2.0804E+08
600010.E-03  2.6042E+03  7.2484E+07  2.1470E+08
720010.E-03  2.0833E+03  7.4807E+07  2.2283E+08
840010.E-03  2.1875E+03  7.9383E+07  2.3442E+08
960010.E-03  2.1875E+03  8.5013E+07  2.4977E+08
108001.E-02  3.1250E+03  8.7546E+07  2.5658E+08
120001.E-02  3.4375E+03  9.0683E+07  2.6540E+08
132001.E-02  3.6458E+03  9.6684E+07  2.8197E+08
144001.E-02  4.1667E+03  9.4981E+07  2.7843E+08
156001.E-02  3.8542E+03  9.7918E+07  2.8567E+08
168001.E-02  5.2083E+03  9.8230E+07  2.8614E+08
180001.E-02  6.0417E+03  1.0126E+08  2.9613E+08
192001.E-02  5.2083E+03  1.0324E+08  3.0035E+08
204001.E-02  5.6250E+03  1.0206E+08  2.9799E+08
216001.E-02  5.8333E+03  1.0427E+08  3.0371E+08
228001.E-02  5.9375E+03  1.0437E+08  3.0312E+08
240001.E-02  6.5625E+03  1.0528E+08  3.0420E+08
252001.E-02  6.2500E+03  1.0771E+08  3.1178E+08
264001.E-02  8.7500E+03  1.1074E+08  3.2097E+08
276001.E-02  8.0208E+03  1.1230E+08  3.2432E+08
288001.E-02  9.1667E+03  1.1304E+08  3.2545E+08
300001.E-02  7.1875E+03  1.1482E+08  3.2982E+08
312001.E-02  1.1250E+04  1.1597E+08  3.3348E+08
324001.E-02  1.1250E+04  1.1831E+08  3.3937E+08
336001.E-02  1.3333E+04  1.2169E+08  3.4726E+08
348001.E-02  1.2083E+04  1.2282E+08  3.5192E+08
360001.E-02  1.3854E+04  1.2269E+08  3.5078E+08
372001.E-02  1.5729E+04  1.1912E+08  3.4348E+08
384001.E-02  1.5104E+04  1.2055E+08  3.4551E+08
396001.E-02  1.4375E+04  1.2272E+08  3.5139E+08
408001.E-02  1.5417E+04  1.1720E+08  3.3640E+08
420001.E-02  1.3229E+04  1.1635E+08  3.3575E+08
432001.E-02  1.7708E+04  1.1921E+08  3.4266E+08
444001.E-02  1.7187E+04  1.1745E+08  3.3916E+08
456001.E-02  1.9896E+04  1.1229E+08  3.2405E+08
468001.E-02  1.6250E+04  1.0699E+08  3.1036E+08
480001.E-02  1.8750E+04  1.0511E+08  3.0636E+08
492001.E-02  1.6979E+04  1.0311E+08  3.0093E+08
504001.E-02  1.7396E+04  9.8885E+07  2.8950E+08
516001.E-02  1.8750E+04  9.6347E+07  2.8253E+08
528001.E-02  2.0417E+04  9.5399E+07  2.7942E+08
540001.E-02  1.8021E+04  9.1227E+07  2.6954E+08
552001.E-02  1.9583E+04  8.8209E+07  2.5986E+08
564001.E-02  2.0729E+04  8.4422E+07  2.4946E+08
576001.E-02  1.8125E+04  8.0970E+07  2.4036E+08
588001.E-02  1.9167E+04  7.8170E+07  2.3332E+08
600001.E-02  1.9271E+04  7.3104E+07  2.2014E+08
612001.E-02  1.8021E+04  6.9090E+07  2.0848E+08
624001.E-02  1.8958E+04  6.3690E+07  1.9215E+08
636001.E-02  1.7500E+04  6.1923E+07  1.8553E+08
648001.E-02  1.7917E+04  5.9526E+07  1.7874E+08
660001.E-02  1.7083E+04  5.6122E+07  1.6762E+08
672001.E-02  1.8229E+04  5.1493E+07  1.5313E+08
684001.E-02  1.7292E+04  4.7975E+07  1.4249E+08
696001.E-02  1.4792E+04  4.6050E+07  1.3667E+08
708001.E-02  1.4792E+04  4.3241E+07  1.2755E+08
720001.E-02  1.4687E+04  3.8427E+07  1.1289E+08
732001.E-02  1.4792E+04  3.4975E+07  1.0306E+08
744001.E-02  1.4479E+04  3.1449E+07  9.1781E+07
756001.E-02  1.0937E+04  2.6887E+07  7.8790E+07
768001.E-02  1.0312E+04  2.4207E+07  7.0862E+07
780001.E-02  8.3333E+03  2.1214E+07  6.2230E+07
792001.E-02  9.7917E+03  1.9157E+07  5.6434E+07
804001.E-02  8.1250E+03  1.7248E+07  5.0634E+07
816001.E-02  8.1250E+03  1.4522E+07  4.2612E+07
828001.E-02  7.7083E+03  1.3307E+07  3.8421E+07
840001.E-02  5.4167E+03  1.1863E+07  3.4682E+07
852001.E-02  6.5625E+03  1.0971E+07  3.1799E+07
864001.E-02  3.3333E+03  9.0513E+06  2.6312E+07
876001.E-02  4.4792E+03  7.5495E+06  2.1998E+07
888001.E-02  2.8125E+03  6.6603E+06  1.9495E+07
900001.E-02  3.8542E+03  5.3328E+06  1.5542E+07
912001.E-02  2.5000E+03  4.4026E+06  1.3065E+07
924001.E-02  1.9792E+03  3.4953E+06  1.0383E+07
936001.E-02  1.5625E+03  3.0078E+06  9.0327E+06
948001.E-02  2.3958E+03  2.5248E+06  7.4639E+06
960001.E-02  1.1458E+03  1.9054E+06  5.5219E+06
972001.E-02  9.3750E+02  1.7140E+06  4.9407E+06
984001.E-02  1.2500E+03  1.6364E+06  4.7713E+06
996001.E-02  6.2500E+02  1.1877E+06  3.4064E+06
100800.E-01  6.2500E+02  7.5966E+05  2.2891E+06
102000.E-01  4.1667E+02  7.1965E+05  2.0892E+06
103200.E-01  1.0417E+02  5.5430E+05  1.5799E+06
104400.E-01  3.1250E+02  4.3990E+05  1.2226E+06
105600.E-01  2.0833E+02  3.6812E+05  1.0267E+06
106800.E-01  0.0000E+00  2.7958E+05  7.8279E+05
108000.E-01  1.0417E+02  2.2979E+05  6.5005E+05
109200.E-01  1.0417E+02  2.0271E+05  5.6878E+05
110400.E-01  0.0000E+00  9.1875E+04  2.7302E+05
111600.E-01  0.0000E+00  8.6354E+04  2.6958E+05
112800.E-01  0.0000E+00  9.7291E+04  2.4781E+05
114000.E-01  0.0000E+00  9.2395E+04  2.4812E+05
115200.E-01  0.0000E+00  6.2500E+04  1.7521E+05
116400.E-01  0.0000E+00  3.7813E+04  1.2531E+05
117600.E-01  0.0000E+00  3.6771E+04  1.0427E+05
118800.E-01  0.0000E+00  3.1250E+04  1.0021E+05
120000.E-01  0.0000E+00  2.6875E+04  6.7292E+04
