====== Fe (2000) into Layer 1                   =======
        SRIM-2013.00
==================================================
      ION and final RECOIL ATOM Distributions     
 See  SRIM Outputs\TDATA.txt for calculation details
==================================================
See file :  SRIM Outputs\TDATA.txt   for details of calculation
 Ion    = Fe   Energy = 2000  keV
============= TARGET MATERIAL ======================================
Layer  1 : Layer 1
Layer Width =     1.E+04 A   Layer # 1- Density = 8.481E22 atoms/cm3 = 7.865 g/cm3
  Layer # 1- Fe = 100  Atomic Percent = 100  Mass Percent
====================================================================
 Total Ions calculated =20000.00
 Ion Average Range =   678.5E+01 A   Straggling =   165.9E+01 A
 Ion Lateral Range =   140.1E+01 A   Straggling =   175.1E+01 A
 Ion Radial  Range =   219.2E+01 A   Straggling =   114.4E+01 A
====================================================================
 Transmitted Ions =;  Backscattered Ions =3
 (These are not included in Skewne- and Kurtosis below.)

 Range Skewne- = -000.6223  &= [-(X-Rp)^3]/[N*Straggle^3]
 Range Kurtosis = 003.3941  &= [-(X-Rp)^4]/[N*Straggle^4]
 Statistical definitions above are those used in VLSI implant modelling.
====================================================================
=================================================================
  Table Distribution Units are >>>  (Atoms/cm3) / (Atoms/cm2)  <<<  
=================================================================
   DEPTH         Fe         Fe    
   (Ang.)       Ions     Tgt. Atoms
-----------  ----------  ----------
120010.E-03  8.3333E+01  4.6949E+07
240010.E-03  1.6667E+02  6.2231E+07
360010.E-03  1.6667E+02  6.8270E+07
480010.E-03  4.1667E+01  7.0926E+07
600010.E-03  2.9167E+02  7.3898E+07
720010.E-03  1.2500E+02  7.8884E+07
840010.E-03  3.7500E+02  8.3710E+07
960010.E-03  3.3333E+02  8.3979E+07
108001.E-02  3.3333E+02  8.5073E+07
120001.E-02  3.7500E+02  9.1216E+07
132001.E-02  5.0000E+02  9.5475E+07
144001.E-02  5.8333E+02  9.5374E+07
156001.E-02  8.7500E+02  9.8186E+07
168001.E-02  7.9167E+02  1.0036E+08
180001.E-02  6.2500E+02  1.0419E+08
192001.E-02  1.0417E+03  1.0613E+08
204001.E-02  9.1667E+02  1.0865E+08
216001.E-02  1.0833E+03  1.1050E+08
228001.E-02  1.0000E+03  1.1307E+08
240001.E-02  1.2083E+03  1.1704E+08
252001.E-02  1.8333E+03  1.1913E+08
264001.E-02  1.8750E+03  1.2028E+08
276001.E-02  1.7083E+03  1.2439E+08
288001.E-02  2.7083E+03  1.2814E+08
300001.E-02  2.2917E+03  1.2875E+08
312001.E-02  2.4167E+03  1.3239E+08
324001.E-02  3.1250E+03  1.3467E+08
336001.E-02  3.0833E+03  1.4033E+08
348001.E-02  3.7083E+03  1.4435E+08
360001.E-02  3.9583E+03  1.4642E+08
372001.E-02  4.2500E+03  1.4961E+08
384001.E-02  5.0417E+03  1.5265E+08
396001.E-02  5.0417E+03  1.5571E+08
408001.E-02  6.0833E+03  1.5756E+08
420001.E-02  5.5833E+03  1.6136E+08
432001.E-02  6.3333E+03  1.6414E+08
444001.E-02  6.5833E+03  1.6774E+08
456001.E-02  7.8333E+03  1.7342E+08
468001.E-02  8.5833E+03  1.8048E+08
480001.E-02  8.9583E+03  1.8256E+08
492001.E-02  9.6667E+03  1.8212E+08
504001.E-02  1.0958E+04  1.8426E+08
516001.E-02  1.0583E+04  1.8585E+08
528001.E-02  1.1958E+04  1.9121E+08
540001.E-02  1.4000E+04  1.9079E+08
552001.E-02  1.2667E+04  1.9351E+08
564001.E-02  1.5542E+04  1.9032E+08
576001.E-02  1.5750E+04  1.9103E+08
588001.E-02  1.6042E+04  1.9230E+08
600001.E-02  1.7167E+04  1.9325E+08
612001.E-02  1.8250E+04  1.9527E+08
624001.E-02  1.9333E+04  1.9472E+08
636001.E-02  2.1000E+04  1.9012E+08
648001.E-02  2.1375E+04  1.8882E+08
660001.E-02  2.4958E+04  1.8356E+08
672001.E-02  2.4292E+04  1.8189E+08
684001.E-02  2.4333E+04  1.7527E+08
696001.E-02  2.6167E+04  1.7114E+08
708001.E-02  2.4292E+04  1.6624E+08
720001.E-02  2.4958E+04  1.5923E+08
732001.E-02  2.4875E+04  1.5000E+08
744001.E-02  2.6667E+04  1.4448E+08
756001.E-02  2.3917E+04  1.3525E+08
768001.E-02  2.5000E+04  1.2678E+08
780001.E-02  2.3958E+04  1.1935E+08
792001.E-02  2.4667E+04  1.0847E+08
804001.E-02  2.3500E+04  1.0073E+08
816001.E-02  2.1750E+04  9.1634E+07
828001.E-02  2.0333E+04  8.5360E+07
840001.E-02  2.0500E+04  7.5538E+07
852001.E-02  1.8583E+04  6.4111E+07
864001.E-02  1.8625E+04  5.7165E+07
876001.E-02  1.5042E+04  4.6981E+07
888001.E-02  1.4042E+04  3.9758E+07
900001.E-02  1.2292E+04  3.3439E+07
912001.E-02  9.2500E+03  2.7137E+07
924001.E-02  7.9167E+03  2.3229E+07
936001.E-02  7.5833E+03  1.8721E+07
948001.E-02  6.1250E+03  1.5576E+07
960001.E-02  6.1250E+03  1.2620E+07
972001.E-02  4.4167E+03  8.9369E+06
984001.E-02  3.9583E+03  6.7611E+06
996001.E-02  2.6250E+03  4.4439E+06
100800.E-01  2.2083E+03  3.4515E+06
102000.E-01  1.0833E+03  1.8405E+06
103200.E-01  9.1667E+02  1.4688E+06
104400.E-01  8.3333E+02  1.2329E+06
105600.E-01  6.2500E+02  6.9532E+05
106800.E-01  2.5000E+02  3.0253E+05
108000.E-01  2.0833E+02  1.6192E+05
109200.E-01  4.1667E+01  1.1550E+05
110400.E-01  4.1667E+01  1.0787E+05
111600.E-01  8.3333E+01  6.0458E+04
112800.E-01  0.0000E+00  2.1417E+04
114000.E-01  4.1667E+01  2.5792E+04
115200.E-01  0.0000E+00  5.0000E+02
116400.E-01  0.0000E+00  0.0000E+00
117600.E-01  0.0000E+00  0.0000E+00
118800.E-01  0.0000E+00  0.0000E+00
120000.E-01  0.0000E+00  0.0000E+00
