====== H (3000) into Layer 1                    =======
        SRIM-2013.00
==================================================
      ION and final RECOIL ATOM Distributions     
 See  SRIM Outputs\TDATA.txt for calculation details
==================================================
See file :  SRIM Outputs\TDATA.txt   for details of calculation
 Ion    =  H   Energy = 3000  keV
============= TARGET MATERIAL ======================================
Layer  1 : Layer 1
Layer Width =     5.E+05 A   Layer # 1- Density = 8.481E22 atoms/cm3 = 7.865 g/cm3
  Layer # 1- Fe = 100  Atomic Percent = 100  Mass Percent
====================================================================
 Total Ions calculated =13543.56
 Ion Average Range =   350.1E+03 A   Straggling =   922.0E+01 A
 Ion Lateral Range =   189.7E+02 A   Straggling =   251.7E+02 A
 Ion Radial  Range =   296.3E+02 A   Straggling =   196.7E+02 A
====================================================================
 Transmitted Ions =;  Backscattered Ions =2
 (These are not included in Skewne- and Kurtosis below.)

 Range Skewne- = -016.6420  &= [-(X-Rp)^3]/[N*Straggle^3]
 Range Kurtosis = 433.6429  &= [-(X-Rp)^4]/[N*Straggle^4]
 Statistical definitions above are those used in VLSI implant modelling.
====================================================================
=================================================================
  Table Distribution Units are >>>  (Atoms/cm3) / (Atoms/cm2)  <<<  
=================================================================
   DEPTH          H       Recoil     
   (Ang.)       Ions     Distribution
-----------  ----------  ------------
500001.E-02  0.0000E+00  2.0556E+03
100000.E-01  0.0000E+00  2.6123E+03
150000.E-01  0.0000E+00  4.0743E+03
200000.E-01  1.4767E+00  1.9832E+03
250000.E-01  0.0000E+00  2.7688E+03
300000.E-01  0.0000E+00  2.7378E+03
350000.E-01  0.0000E+00  2.2284E+03
400000.E-01  0.0000E+00  3.3418E+03
450000.E-01  0.0000E+00  5.8035E+03
500000.E-01  0.0000E+00  1.9242E+03
550000.E-01  0.0000E+00  3.5190E+03
600000.E-01  0.0000E+00  3.1971E+03
650000.E-01  1.4767E+00  3.0169E+03
700000.E-01  0.0000E+00  4.1688E+03
750000.E-01  0.0000E+00  3.2399E+03
800000.E-01  0.0000E+00  4.1392E+03
850000.E-01  0.0000E+00  2.5946E+03
900000.E-01  2.9534E+00  2.5237E+03
950000.E-01  0.0000E+00  3.0538E+03
100000.E+00  1.4767E+00  3.1425E+03
105000.E+00  0.0000E+00  3.3241E+03
110000.E+00  0.0000E+00  4.7934E+03
115000.E+00  0.0000E+00  2.0467E+03
120000.E+00  0.0000E+00  3.6711E+03
125000.E+00  0.0000E+00  3.0332E+03
130000.E+00  0.0000E+00  5.3649E+03
135000.E+00  0.0000E+00  6.1668E+03
140000.E+00  0.0000E+00  3.7686E+03
145000.E+00  0.0000E+00  4.5749E+03
150000.E+00  0.0000E+00  4.5734E+03
155000.E+00  0.0000E+00  3.2192E+03
160000.E+00  0.0000E+00  5.1596E+03
165000.E+00  1.4767E+00  5.9704E+03
170000.E+00  0.0000E+00  3.5161E+03
175000.E+00  1.4767E+00  4.7403E+03
180000.E+00  0.0000E+00  4.0831E+03
185000.E+00  1.4767E+00  4.2869E+03
190000.E+00  0.0000E+00  5.8197E+03
195000.E+00  1.4767E+00  3.9989E+03
200000.E+00  0.0000E+00  4.3991E+03
205000.E+00  0.0000E+00  4.1717E+03
210000.E+00  1.4767E+00  4.2278E+03
215000.E+00  1.4767E+00  5.0902E+03
220000.E+00  1.4767E+00  4.2027E+03
225000.E+00  0.0000E+00  3.8808E+03
230000.E+00  4.4301E+00  4.9810E+03
235000.E+00  0.0000E+00  6.0368E+03
240000.E+00  1.4767E+00  7.4618E+03
245000.E+00  1.4767E+00  5.6396E+03
250000.E+00  4.4301E+00  4.3091E+03
255000.E+00  0.0000E+00  7.0292E+03
260000.E+00  0.0000E+00  9.4569E+03
265000.E+00  4.4301E+00  6.0929E+03
270000.E+00  0.0000E+00  5.8463E+03
275000.E+00  4.4301E+00  8.2888E+03
280000.E+00  7.3836E+00  7.4796E+03
285000.E+00  1.0337E+01  1.0370E+04
290000.E+00  7.3836E+00  9.4569E+03
295000.E+00  7.3836E+00  9.1364E+03
300000.E+00  1.0337E+01  9.2753E+03
305000.E+00  1.3290E+01  9.2310E+03
310000.E+00  1.9197E+01  1.1527E+04
315000.E+00  2.6581E+01  1.1086E+04
320000.E+00  4.7255E+01  1.2004E+04
325000.E+00  4.5778E+01  1.1871E+04
330000.E+00  7.8266E+01  1.6104E+04
335000.E+00  1.2700E+02  2.0117E+04
340000.E+00  2.6138E+02  2.3898E+04
345000.E+00  8.3730E+02  3.8708E+04
350000.E+00  4.2057E+03  8.5122E+04
355000.E+00  1.3657E+04  1.0576E+05
360000.E+00  5.9659E+02  1.8621E+03
365000.E+00  0.0000E+00  0.0000E+00
370000.E+00  0.0000E+00  0.0000E+00
375000.E+00  0.0000E+00  0.0000E+00
380000.E+00  0.0000E+00  0.0000E+00
385000.E+00  0.0000E+00  0.0000E+00
390000.E+00  0.0000E+00  0.0000E+00
395000.E+00  0.0000E+00  0.0000E+00
400000.E+00  0.0000E+00  0.0000E+00
405000.E+00  0.0000E+00  0.0000E+00
410000.E+00  0.0000E+00  0.0000E+00
415000.E+00  0.0000E+00  0.0000E+00
420000.E+00  0.0000E+00  0.0000E+00
425000.E+00  0.0000E+00  0.0000E+00
430000.E+00  0.0000E+00  0.0000E+00
435000.E+00  0.0000E+00  0.0000E+00
440000.E+00  0.0000E+00  0.0000E+00
445000.E+00  0.0000E+00  0.0000E+00
450000.E+00  0.0000E+00  0.0000E+00
455000.E+00  0.0000E+00  0.0000E+00
460000.E+00  0.0000E+00  0.0000E+00
465000.E+00  0.0000E+00  0.0000E+00
470000.E+00  0.0000E+00  0.0000E+00
475000.E+00  0.0000E+00  0.0000E+00
480000.E+00  0.0000E+00  0.0000E+00
485000.E+00  0.0000E+00  0.0000E+00
490000.E+00  0.0000E+00  0.0000E+00
495000.E+00  0.0000E+00  0.0000E+00
500000.E+00  0.0000E+00  0.0000E+00
