====== Fe (500) into Layer 1                    =======
        SRIM-2013.00
==================================================
      ION and final RECOIL ATOM Distributions     
 See  SRIM Outputs\TDATA.txt for calculation details
==================================================
See file :  SRIM Outputs\TDATA.txt   for details of calculation
 Ion    = Fe   Energy = 500  keV
============= TARGET MATERIAL ======================================
Layer  1 : Layer 1
Layer Width =     6.E+03 A   Layer # 1- Density = 8.481E22 atoms/cm3 = 7.865 g/cm3
  Layer # 1- Fe = 100  Atomic Percent = 100  Mass Percent
====================================================================
 Total Ions calculated =20000.00
 Ion Average Range =   174.7E+01 A   Straggling =   660.4E+00 A
 Ion Lateral Range =   471.7E+00 A   Straggling =   601.5E+00 A
 Ion Radial  Range =   742.0E+00 A   Straggling =   416.1E+00 A
====================================================================
 Transmitted Ions =;  Backscattered Ions =18
 (These are not included in Skewne- and Kurtosis below.)

 Range Skewne- = -000.0283  &= [-(X-Rp)^3]/[N*Straggle^3]
 Range Kurtosis = 002.6092  &= [-(X-Rp)^4]/[N*Straggle^4]
 Statistical definitions above are those used in VLSI implant modelling.
====================================================================
=================================================================
  Table Distribution Units are >>>  (Atoms/cm3) / (Atoms/cm2)  <<<  
=================================================================
   DEPTH         Fe         Fe    
   (Ang.)       Ions     Tgt. Atoms
-----------  ----------  ----------
600100.E-04  1.9167E+03  9.0264E+07
120010.E-03  3.0833E+03  1.3442E+08
180010.E-03  3.2500E+03  1.5245E+08
240010.E-03  5.1667E+03  1.6868E+08
300010.E-03  5.1667E+03  1.7854E+08
360010.E-03  7.4167E+03  1.9204E+08
420010.E-03  1.0250E+04  2.0282E+08
480010.E-03  1.2250E+04  2.0848E+08
540010.E-03  1.2250E+04  2.1526E+08
600010.E-03  1.4167E+04  2.2279E+08
660010.E-03  1.5333E+04  2.3211E+08
720010.E-03  1.9917E+04  2.4176E+08
780010.E-03  1.9750E+04  2.4901E+08
840010.E-03  2.2833E+04  2.5355E+08
900010.E-03  2.7833E+04  2.5561E+08
960010.E-03  3.2250E+04  2.6067E+08
102001.E-02  2.9833E+04  2.6545E+08
108001.E-02  3.4250E+04  2.6601E+08
114001.E-02  3.8417E+04  2.6467E+08
120001.E-02  4.0084E+04  2.6612E+08
126001.E-02  4.0084E+04  2.6674E+08
132001.E-02  4.8500E+04  2.6949E+08
138001.E-02  4.8667E+04  2.6585E+08
144001.E-02  5.1167E+04  2.5869E+08
150001.E-02  5.2583E+04  2.5487E+08
156001.E-02  5.5250E+04  2.4966E+08
162001.E-02  5.6250E+04  2.4145E+08
168001.E-02  5.4917E+04  2.3292E+08
174001.E-02  5.4167E+04  2.2243E+08
180001.E-02  5.4833E+04  2.0930E+08
186001.E-02  5.5750E+04  2.0136E+08
192001.E-02  5.7083E+04  1.9064E+08
198001.E-02  5.7417E+04  1.7978E+08
204001.E-02  5.7000E+04  1.6812E+08
210001.E-02  5.4833E+04  1.5590E+08
216001.E-02  4.8833E+04  1.4125E+08
222001.E-02  5.1250E+04  1.2560E+08
228001.E-02  4.7417E+04  1.1286E+08
234001.E-02  4.2667E+04  9.8972E+07
240001.E-02  4.0084E+04  8.8193E+07
246001.E-02  3.7334E+04  7.6357E+07
252001.E-02  3.5417E+04  6.7180E+07
258001.E-02  3.3250E+04  5.8548E+07
264001.E-02  2.7667E+04  4.9196E+07
270001.E-02  2.5000E+04  4.1991E+07
276001.E-02  1.9333E+04  3.5418E+07
282001.E-02  1.6917E+04  2.8448E+07
288001.E-02  1.6167E+04  2.3785E+07
294001.E-02  1.4417E+04  2.0080E+07
300001.E-02  1.1750E+04  1.6704E+07
306001.E-02  1.0333E+04  1.2507E+07
312001.E-02  8.1667E+03  1.0036E+07
318001.E-02  6.6667E+03  7.7927E+06
324001.E-02  5.7500E+03  5.7279E+06
330001.E-02  4.2500E+03  3.8255E+06
336001.E-02  2.5833E+03  2.9803E+06
342001.E-02  1.7500E+03  1.8938E+06
348001.E-02  8.3333E+02  1.1833E+06
354001.E-02  8.3333E+02  8.5984E+05
360001.E-02  1.3333E+03  7.6128E+05
366001.E-02  5.8333E+02  4.7653E+05
372001.E-02  4.1667E+02  3.1783E+05
378001.E-02  1.6667E+02  1.6525E+05
384001.E-02  0.0000E+00  1.2517E+05
390001.E-02  8.3333E+01  7.1750E+04
396001.E-02  8.3333E+01  1.9083E+04
402001.E-02  0.0000E+00  8.3333E+01
408001.E-02  0.0000E+00  0.0000E+00
414001.E-02  0.0000E+00  0.0000E+00
420001.E-02  0.0000E+00  0.0000E+00
426001.E-02  0.0000E+00  0.0000E+00
432001.E-02  0.0000E+00  0.0000E+00
438001.E-02  0.0000E+00  0.0000E+00
444001.E-02  0.0000E+00  0.0000E+00
450001.E-02  0.0000E+00  0.0000E+00
456001.E-02  0.0000E+00  0.0000E+00
462001.E-02  0.0000E+00  0.0000E+00
468001.E-02  0.0000E+00  0.0000E+00
474001.E-02  0.0000E+00  0.0000E+00
480001.E-02  0.0000E+00  0.0000E+00
486001.E-02  0.0000E+00  0.0000E+00
492001.E-02  0.0000E+00  0.0000E+00
498001.E-02  0.0000E+00  0.0000E+00
504001.E-02  0.0000E+00  0.0000E+00
510001.E-02  0.0000E+00  0.0000E+00
516001.E-02  0.0000E+00  0.0000E+00
522001.E-02  0.0000E+00  0.0000E+00
528001.E-02  0.0000E+00  0.0000E+00
534001.E-02  0.0000E+00  0.0000E+00
540001.E-02  0.0000E+00  0.0000E+00
546001.E-02  0.0000E+00  0.0000E+00
552001.E-02  0.0000E+00  0.0000E+00
558001.E-02  0.0000E+00  0.0000E+00
564001.E-02  0.0000E+00  0.0000E+00
570001.E-02  0.0000E+00  0.0000E+00
576001.E-02  0.0000E+00  0.0000E+00
582001.E-02  0.0000E+00  0.0000E+00
588001.E-02  0.0000E+00  0.0000E+00
594001.E-02  0.0000E+00  0.0000E+00
600001.E-02  0.0000E+00  0.0000E+00
