====== H (3000) into Layer 1                    =======
        SRIM-2013.00
==================================================
      ION and final RECOIL ATOM Distributions     
 See  SRIM Outputs\TDATA.txt for calculation details
==================================================
See file :  SRIM Outputs\TDATA.txt   for details of calculation
 Ion    =  H   Energy = 3000  keV
============= TARGET MATERIAL ======================================
Layer  1 : Layer 1
Layer Width =     5.E+05 A   Layer # 1- Density = 8.481E22 atoms/cm3 = 7.865 g/cm3
  Layer # 1- Fe = 100  Atomic Percent = 100  Mass Percent
====================================================================
 Total Ions calculated =20000.00
 Ion Average Range =   353.2E+03 A   Straggling =   114.8E+02 A
 Ion Lateral Range =   165.8E+02 A   Straggling =   234.7E+02 A
 Ion Radial  Range =   261.0E+02 A   Straggling =   202.4E+02 A
====================================================================
 Transmitted Ions =;  Backscattered Ions =1
 (These are not included in Skewne- and Kurtosis below.)

 Range Skewne- = -007.5594  &= [-(X-Rp)^3]/[N*Straggle^3]
 Range Kurtosis = 122.7434  &= [-(X-Rp)^4]/[N*Straggle^4]
 Statistical definitions above are those used in VLSI implant modelling.
====================================================================
=================================================================
  Table Distribution Units are >>>  (Atoms/cm3) / (Atoms/cm2)  <<<  
=================================================================
   DEPTH          H         Fe    
   (Ang.)       Ions     Tgt. Atoms
-----------  ----------  ----------
500001.E-02  0.0000E+00  1.2670E+03
100000.E-01  0.0000E+00  2.8820E+03
150000.E-01  0.0000E+00  3.2550E+03
200000.E-01  0.0000E+00  3.5470E+03
250000.E-01  0.0000E+00  2.5580E+03
300000.E-01  0.0000E+00  3.3510E+03
350000.E-01  0.0000E+00  4.7990E+03
400000.E-01  1.0000E+00  5.0190E+03
450000.E-01  0.0000E+00  2.4440E+03
500000.E-01  0.0000E+00  3.7850E+03
550000.E-01  0.0000E+00  2.9160E+03
600000.E-01  1.0000E+00  3.3850E+03
650000.E-01  1.0000E+00  2.9290E+03
700000.E-01  0.0000E+00  2.7940E+03
750000.E-01  0.0000E+00  3.4250E+03
800000.E-01  0.0000E+00  3.0720E+03
850000.E-01  0.0000E+00  2.8660E+03
900000.E-01  1.0000E+00  3.2240E+03
950000.E-01  0.0000E+00  4.3270E+03
100000.E+00  1.0000E+00  3.1470E+03
105000.E+00  0.0000E+00  4.8770E+03
110000.E+00  0.0000E+00  3.6330E+03
115000.E+00  1.0000E+00  2.5430E+03
120000.E+00  0.0000E+00  5.6570E+03
125000.E+00  0.0000E+00  4.8530E+03
130000.E+00  0.0000E+00  3.5940E+03
135000.E+00  0.0000E+00  4.5410E+03
140000.E+00  0.0000E+00  3.0650E+03
145000.E+00  2.0000E+00  5.1050E+03
150000.E+00  2.0000E+00  3.5270E+03
155000.E+00  1.0000E+00  5.7540E+03
160000.E+00  2.0000E+00  4.8990E+03
165000.E+00  0.0000E+00  4.2300E+03
170000.E+00  0.0000E+00  4.5520E+03
175000.E+00  0.0000E+00  6.1330E+03
180000.E+00  1.0000E+00  4.7540E+03
185000.E+00  0.0000E+00  4.9530E+03
190000.E+00  0.0000E+00  5.0750E+03
195000.E+00  0.0000E+00  3.1780E+03
200000.E+00  0.0000E+00  6.6750E+03
205000.E+00  1.0000E+00  4.1860E+03
210000.E+00  1.0000E+00  6.4930E+03
215000.E+00  2.0000E+00  5.9880E+03
220000.E+00  1.0000E+00  4.4260E+03
225000.E+00  4.0000E+00  5.7660E+03
230000.E+00  2.0000E+00  5.1490E+03
235000.E+00  3.0000E+00  6.3100E+03
240000.E+00  2.0000E+00  5.9530E+03
245000.E+00  4.0000E+00  6.4550E+03
250000.E+00  3.0000E+00  6.3460E+03
255000.E+00  3.0000E+00  5.5200E+03
260000.E+00  4.0000E+00  7.5500E+03
265000.E+00  3.0000E+00  6.5730E+03
270000.E+00  2.0000E+00  7.4730E+03
275000.E+00  4.0000E+00  7.4510E+03
280000.E+00  8.0000E+00  8.6400E+03
285000.E+00  6.0000E+00  7.8430E+03
290000.E+00  7.0000E+00  1.0013E+04
295000.E+00  1.0000E+01  8.4060E+03
300000.E+00  1.5000E+01  1.0564E+04
305000.E+00  1.8000E+01  1.0147E+04
310000.E+00  2.0000E+01  1.0610E+04
315000.E+00  3.0000E+01  1.2281E+04
320000.E+00  3.4000E+01  1.1533E+04
325000.E+00  5.0000E+01  1.4305E+04
330000.E+00  7.4000E+01  1.5294E+04
335000.E+00  1.5800E+02  1.8160E+04
340000.E+00  4.1300E+02  2.6021E+04
345000.E+00  1.3780E+03  3.7489E+04
350000.E+00  3.4190E+03  5.7904E+04
355000.E+00  5.2920E+03  6.5727E+04
360000.E+00  5.0050E+03  4.9451E+04
365000.E+00  2.8270E+03  2.3741E+04
370000.E+00  9.4000E+02  7.3940E+03
375000.E+00  2.2100E+02  1.5900E+03
380000.E+00  2.1000E+01  1.2400E+02
385000.E+00  1.0000E+00  6.0000E+00
390000.E+00  0.0000E+00  0.0000E+00
395000.E+00  0.0000E+00  0.0000E+00
400000.E+00  0.0000E+00  0.0000E+00
405000.E+00  0.0000E+00  0.0000E+00
410000.E+00  0.0000E+00  0.0000E+00
415000.E+00  0.0000E+00  0.0000E+00
420000.E+00  0.0000E+00  0.0000E+00
425000.E+00  0.0000E+00  0.0000E+00
430000.E+00  0.0000E+00  0.0000E+00
435000.E+00  0.0000E+00  0.0000E+00
440000.E+00  0.0000E+00  0.0000E+00
445000.E+00  0.0000E+00  0.0000E+00
450000.E+00  0.0000E+00  0.0000E+00
455000.E+00  0.0000E+00  0.0000E+00
460000.E+00  0.0000E+00  0.0000E+00
465000.E+00  0.0000E+00  0.0000E+00
470000.E+00  0.0000E+00  0.0000E+00
475000.E+00  0.0000E+00  0.0000E+00
480000.E+00  0.0000E+00  0.0000E+00
485000.E+00  0.0000E+00  0.0000E+00
490000.E+00  0.0000E+00  0.0000E+00
495000.E+00  0.0000E+00  0.0000E+00
500000.E+00  0.0000E+00  0.0000E+00
