====== Xe (10) into Layer 1                     =======
        SRIM-2013.00
==================================================
      ION and final RECOIL ATOM Distributions     
 See  SRIM Outputs\TDATA.txt for calculation details
==================================================
See file :  SRIM Outputs\TDATA.txt   for details of calculation
 Ion    = Xe   Energy = 300  keV
============= TARGET MATERIAL ======================================
Layer  1 : Uranium oxide (ICRU-670)
Layer Width =     3.E+03 A   Layer # 1- Density = 7.339E22 atoms/cm3 = 10.97 g/cm3
  Layer # 1-  U = 33.3 Atomic Percent = 88.1 Mass Percent
  Layer # 1-  O = 66.6 Atomic Percent = 11.8 Mass Percent
====================================================================
 Total Ions calculated =20000.00
 Ion Average Range =   559.3E+00 A   Straggling =   271.3E+00 A
 Ion Lateral Range =   193.9E+00 A   Straggling =   247.2E+00 A
 Ion Radial  Range =   306.0E+00 A   Straggling =   171.1E+00 A
====================================================================
 Transmitted Ions =;  Backscattered Ions =438
 (These are not included in Skewne- and Kurtosis below.)

 Range Skewne- = 000.3284  &= [-(X-Rp)^3]/[N*Straggle^3]
 Range Kurtosis = 002.7867  &= [-(X-Rp)^4]/[N*Straggle^4]
 Statistical definitions above are those used in VLSI implant modelling.
====================================================================
=================================================================
  Table Distribution Units are >>>  (Atoms/cm3) / (Atoms/cm2)  <<<  
=================================================================
   DEPTH         Xe          U          O    
   (Ang.)       Ions     Tgt. Atoms  Tgt. Atoms
-----------  ----------  ----------  ----------
300100.E-04  1.5833E+04  6.9261E+07  2.1996E+08
600100.E-04  3.2667E+04  9.2637E+07  2.7707E+08
900100.E-04  4.0333E+04  1.0980E+08  3.3013E+08
120010.E-03  4.8000E+04  1.2336E+08  3.6795E+08
150010.E-03  5.1667E+04  1.3306E+08  3.9527E+08
180010.E-03  6.8000E+04  1.4101E+08  4.1526E+08
210010.E-03  6.8500E+04  1.4610E+08  4.3099E+08
240010.E-03  8.2834E+04  1.4964E+08  4.4043E+08
270010.E-03  9.6000E+04  1.5148E+08  4.4656E+08
300010.E-03  9.2667E+04  1.5227E+08  4.4937E+08
330010.E-03  1.0883E+05  1.5399E+08  4.5441E+08
360010.E-03  1.1483E+05  1.5002E+08  4.4220E+08
390010.E-03  1.2183E+05  1.4507E+08  4.2973E+08
420010.E-03  1.3117E+05  1.4054E+08  4.1703E+08
450010.E-03  1.2567E+05  1.3384E+08  3.9832E+08
480010.E-03  1.2383E+05  1.2686E+08  3.7928E+08
510010.E-03  1.3850E+05  1.2014E+08  3.6223E+08
540010.E-03  1.4467E+05  1.1287E+08  3.4143E+08
570010.E-03  1.3950E+05  1.0552E+08  3.1965E+08
600010.E-03  1.3217E+05  9.7960E+07  2.9673E+08
630010.E-03  1.2483E+05  9.0305E+07  2.7192E+08
660010.E-03  1.2450E+05  8.1728E+07  2.4589E+08
690010.E-03  1.2850E+05  7.4629E+07  2.2360E+08
720010.E-03  1.1950E+05  6.6889E+07  2.0033E+08
750010.E-03  1.0583E+05  5.9279E+07  1.7597E+08
780010.E-03  9.8167E+04  5.2801E+07  1.5586E+08
810010.E-03  8.7834E+04  4.6870E+07  1.3884E+08
840010.E-03  8.4334E+04  4.0665E+07  1.2062E+08
870010.E-03  7.7500E+04  3.5216E+07  1.0428E+08
900010.E-03  6.4500E+04  3.0061E+07  8.9325E+07
930010.E-03  5.6834E+04  2.5669E+07  7.6442E+07
960010.E-03  5.0333E+04  2.2212E+07  6.6008E+07
990010.E-03  5.0333E+04  1.8606E+07  5.5777E+07
102001.E-02  3.6167E+04  1.5344E+07  4.5893E+07
105001.E-02  3.1167E+04  1.2766E+07  3.8896E+07
108001.E-02  2.7333E+04  1.0660E+07  3.2311E+07
111001.E-02  2.4833E+04  8.9651E+06  2.7134E+07
114001.E-02  1.6500E+04  7.3916E+06  2.2575E+07
117001.E-02  1.5833E+04  6.1551E+06  1.8929E+07
120001.E-02  1.4000E+04  5.0969E+06  1.5836E+07
123001.E-02  9.6667E+03  4.1364E+06  1.2808E+07
126001.E-02  8.1667E+03  3.4428E+06  1.0580E+07
129001.E-02  5.3333E+03  2.9066E+06  9.0677E+06
132001.E-02  5.1667E+03  2.5000E+06  7.7359E+06
135001.E-02  5.1667E+03  2.0479E+06  6.3591E+06
138001.E-02  3.0000E+03  1.7873E+06  5.2983E+06
141001.E-02  2.6667E+03  1.4004E+06  4.3579E+06
144001.E-02  1.5000E+03  1.1084E+06  3.5101E+06
147001.E-02  8.3333E+02  9.9807E+05  2.9442E+06
150001.E-02  1.0000E+03  8.5587E+05  2.5487E+06
153001.E-02  6.6667E+02  6.8884E+05  2.1303E+06
156001.E-02  1.6667E+02  5.6066E+05  1.8352E+06
159001.E-02  1.6667E+02  5.1933E+05  1.5852E+06
162001.E-02  1.6667E+02  4.6149E+05  1.4586E+06
165001.E-02  1.6667E+02  4.0283E+05  1.2390E+06
168001.E-02  1.6667E+02  3.2533E+05  1.0379E+06
171001.E-02  0.0000E+00  3.3100E+05  9.3889E+05
174001.E-02  1.6667E+02  2.8016E+05  8.9055E+05
177001.E-02  0.0000E+00  2.0517E+05  6.7733E+05
180001.E-02  0.0000E+00  2.0867E+05  6.5900E+05
183001.E-02  0.0000E+00  1.8433E+05  5.7266E+05
186001.E-02  0.0000E+00  1.2883E+05  4.6299E+05
189001.E-02  0.0000E+00  1.2167E+05  3.8750E+05
192001.E-02  0.0000E+00  1.1833E+05  3.6816E+05
195001.E-02  0.0000E+00  1.2800E+05  3.8683E+05
198001.E-02  0.0000E+00  9.6834E+04  3.2150E+05
201001.E-02  0.0000E+00  1.0567E+05  3.2333E+05
204001.E-02  0.0000E+00  1.0800E+05  3.3333E+05
207001.E-02  0.0000E+00  9.2167E+04  2.8116E+05
210001.E-02  0.0000E+00  7.0000E+04  2.0933E+05
213001.E-02  0.0000E+00  6.4667E+04  2.2167E+05
216001.E-02  0.0000E+00  5.1000E+04  1.6083E+05
219001.E-02  0.0000E+00  4.4667E+04  1.1600E+05
222001.E-02  0.0000E+00  2.4833E+04  8.1167E+04
225001.E-02  0.0000E+00  1.2667E+04  5.3000E+04
228001.E-02  0.0000E+00  9.8333E+03  3.0000E+04
231001.E-02  0.0000E+00  1.4500E+04  3.8000E+04
234001.E-02  0.0000E+00  1.6333E+04  6.0667E+04
237001.E-02  0.0000E+00  7.8333E+03  2.5333E+04
240001.E-02  0.0000E+00  9.5000E+03  4.6167E+04
243001.E-02  0.0000E+00  9.8333E+03  4.4167E+04
246001.E-02  0.0000E+00  1.0333E+04  3.5000E+04
249001.E-02  0.0000E+00  1.0333E+04  3.0500E+04
252001.E-02  0.0000E+00  9.1667E+03  3.7000E+04
255001.E-02  0.0000E+00  9.1667E+03  3.9333E+04
258001.E-02  0.0000E+00  8.5000E+03  2.6500E+04
261001.E-02  0.0000E+00  8.0000E+03  2.5500E+04
264001.E-02  0.0000E+00  1.8333E+03  1.0333E+04
267001.E-02  0.0000E+00  6.6667E+02  8.3333E+02
270001.E-02  0.0000E+00  1.8333E+03  4.5000E+03
273001.E-02  0.0000E+00  3.8333E+03  8.8333E+03
276001.E-02  0.0000E+00  2.1667E+03  3.8333E+03
279001.E-02  0.0000E+00  1.6667E+02  3.3333E+02
282001.E-02  0.0000E+00  0.0000E+00  0.0000E+00
285001.E-02  0.0000E+00  0.0000E+00  0.0000E+00
288001.E-02  0.0000E+00  0.0000E+00  0.0000E+00
291001.E-02  0.0000E+00  0.0000E+00  0.0000E+00
294001.E-02  0.0000E+00  0.0000E+00  0.0000E+00
297001.E-02  0.0000E+00  0.0000E+00  0.0000E+00
300001.E-02  0.0000E+00  0.0000E+00  0.0000E+00
