====== Xe (10) into Layer 1                     =======
        SRIM-2013.00
==================================================
      ION and final RECOIL ATOM Distributions     
 See  SRIM Outputs\TDATA.txt for calculation details
==================================================
See file :  SRIM Outputs\TDATA.txt   for details of calculation
 Ion    = Xe   Energy = 1000  keV
============= TARGET MATERIAL ======================================
Layer  1 : Uranium oxide (ICRU-670)
Layer Width =     6.E+03 A   Layer # 1- Density = 7.339E22 atoms/cm3 = 10.97 g/cm3
  Layer # 1-  U = 33.3 Atomic Percent = 88.1 Mass Percent
  Layer # 1-  O = 66.6 Atomic Percent = 11.8 Mass Percent
====================================================================
 Total Ions calculated =20000.00
 Ion Average Range =   171.3E+01 A   Straggling =   759.6E+00 A
 Ion Lateral Range =   560.9E+00 A   Straggling =   713.0E+00 A
 Ion Radial  Range =   877.8E+00 A   Straggling =   480.0E+00 A
====================================================================
 Transmitted Ions =;  Backscattered Ions =273
 (These are not included in Skewne- and Kurtosis below.)

 Range Skewne- = 000.1662  &= [-(X-Rp)^3]/[N*Straggle^3]
 Range Kurtosis = 002.6554  &= [-(X-Rp)^4]/[N*Straggle^4]
 Statistical definitions above are those used in VLSI implant modelling.
====================================================================
=================================================================
  Table Distribution Units are >>>  (Atoms/cm3) / (Atoms/cm2)  <<<  
=================================================================
   DEPTH         Xe          U          O    
   (Ang.)       Ions     Tgt. Atoms  Tgt. Atoms
-----------  ----------  ----------  ----------
600100.E-04  4.1667E+03  5.9728E+07  1.8257E+08
120010.E-03  6.4167E+03  8.2019E+07  2.3865E+08
180010.E-03  8.0833E+03  9.5558E+07  2.7441E+08
240010.E-03  9.5833E+03  1.0532E+08  2.9972E+08
300010.E-03  1.1000E+04  1.1409E+08  3.2248E+08
360010.E-03  1.3833E+04  1.1899E+08  3.3562E+08
420010.E-03  1.4250E+04  1.2511E+08  3.5205E+08
480010.E-03  1.5167E+04  1.2940E+08  3.6335E+08
540010.E-03  1.8083E+04  1.3568E+08  3.7925E+08
600010.E-03  2.3250E+04  1.3901E+08  3.8806E+08
660010.E-03  2.1333E+04  1.4182E+08  3.9565E+08
720010.E-03  2.3583E+04  1.4465E+08  4.0394E+08
780010.E-03  2.5417E+04  1.4703E+08  4.0929E+08
840010.E-03  2.8000E+04  1.4764E+08  4.1234E+08
900010.E-03  2.9750E+04  1.4867E+08  4.1352E+08
960010.E-03  3.1000E+04  1.4765E+08  4.1110E+08
102001.E-02  3.4500E+04  1.4791E+08  4.1144E+08
108001.E-02  3.6334E+04  1.4596E+08  4.0706E+08
114001.E-02  3.5750E+04  1.4496E+08  4.0495E+08
120001.E-02  4.3334E+04  1.4267E+08  3.9835E+08
126001.E-02  4.2750E+04  1.4076E+08  3.9401E+08
132001.E-02  4.1750E+04  1.3761E+08  3.8584E+08
138001.E-02  4.5250E+04  1.3440E+08  3.7763E+08
144001.E-02  4.6833E+04  1.3263E+08  3.7263E+08
150001.E-02  4.8917E+04  1.3021E+08  3.6631E+08
156001.E-02  4.9750E+04  1.2612E+08  3.5482E+08
162001.E-02  5.2167E+04  1.2047E+08  3.4154E+08
168001.E-02  4.6750E+04  1.1453E+08  3.2512E+08
174001.E-02  5.2083E+04  1.0874E+08  3.0932E+08
180001.E-02  4.8833E+04  1.0186E+08  2.9258E+08
186001.E-02  4.8667E+04  9.6369E+07  2.7873E+08
192001.E-02  5.3417E+04  9.0180E+07  2.6244E+08
198001.E-02  4.3667E+04  8.3602E+07  2.4507E+08
204001.E-02  4.4500E+04  7.7805E+07  2.2867E+08
210001.E-02  4.3000E+04  7.2020E+07  2.1366E+08
216001.E-02  4.3917E+04  6.7392E+07  1.9966E+08
222001.E-02  3.8584E+04  6.1007E+07  1.8241E+08
228001.E-02  4.0584E+04  5.6834E+07  1.7089E+08
234001.E-02  3.8334E+04  5.1782E+07  1.5642E+08
240001.E-02  3.2083E+04  4.6975E+07  1.4181E+08
246001.E-02  2.8417E+04  4.2639E+07  1.2820E+08
252001.E-02  3.1083E+04  3.8754E+07  1.1582E+08
258001.E-02  2.9500E+04  3.4883E+07  1.0376E+08
264001.E-02  2.8333E+04  3.1704E+07  9.3798E+07
270001.E-02  2.3417E+04  2.7397E+07  8.0648E+07
276001.E-02  2.1667E+04  2.4040E+07  7.0634E+07
282001.E-02  1.9667E+04  2.1093E+07  6.2095E+07
288001.E-02  1.3917E+04  1.8737E+07  5.5303E+07
294001.E-02  1.6167E+04  1.6785E+07  4.9020E+07
300001.E-02  1.3500E+04  1.4769E+07  4.3273E+07
306001.E-02  1.1667E+04  1.2883E+07  3.7894E+07
312001.E-02  1.0917E+04  1.0886E+07  3.2305E+07
318001.E-02  9.2500E+03  9.8023E+06  2.8636E+07
324001.E-02  8.5833E+03  8.2241E+06  2.4099E+07
330001.E-02  8.2500E+03  7.0915E+06  2.0772E+07
336001.E-02  7.0000E+03  6.0999E+06  1.8136E+07
342001.E-02  5.5833E+03  5.1740E+06  1.5105E+07
348001.E-02  3.5833E+03  4.4939E+06  1.3144E+07
354001.E-02  4.7500E+03  3.6415E+06  1.0622E+07
360001.E-02  3.3333E+03  3.1475E+06  9.2001E+06
366001.E-02  2.5000E+03  2.5957E+06  7.6268E+06
372001.E-02  2.0000E+03  1.9663E+06  5.7605E+06
378001.E-02  1.1667E+03  1.6322E+06  4.7749E+06
384001.E-02  1.0000E+03  1.3264E+06  3.9193E+06
390001.E-02  7.5000E+02  1.1421E+06  3.3418E+06
396001.E-02  1.3333E+03  1.0624E+06  3.1196E+06
402001.E-02  7.5000E+02  8.9159E+05  2.5991E+06
408001.E-02  4.1667E+02  6.8597E+05  1.9882E+06
414001.E-02  1.6667E+02  5.2204E+05  1.5270E+06
420001.E-02  1.6667E+02  5.1795E+05  1.4713E+06
426001.E-02  8.3333E+01  4.6053E+05  1.3451E+06
432001.E-02  8.3333E+01  4.2327E+05  1.1971E+06
438001.E-02  2.5000E+02  3.8101E+05  1.0747E+06
444001.E-02  0.0000E+00  3.2841E+05  9.7532E+05
450001.E-02  8.3333E+01  3.4267E+05  9.5732E+05
456001.E-02  0.0000E+00  2.6425E+05  7.3796E+05
462001.E-02  0.0000E+00  2.3833E+05  6.6939E+05
468001.E-02  0.0000E+00  1.8475E+05  5.6597E+05
474001.E-02  0.0000E+00  1.7466E+05  5.0445E+05
480001.E-02  0.0000E+00  1.5875E+05  4.6194E+05
486001.E-02  0.0000E+00  1.2075E+05  3.4959E+05
492001.E-02  0.0000E+00  9.4333E+04  2.9916E+05
498001.E-02  0.0000E+00  1.0433E+05  3.1400E+05
504001.E-02  0.0000E+00  9.2083E+04  2.8658E+05
510001.E-02  0.0000E+00  9.5249E+04  2.7125E+05
516001.E-02  0.0000E+00  8.7333E+04  2.5541E+05
522001.E-02  0.0000E+00  8.2500E+04  1.9158E+05
528001.E-02  0.0000E+00  5.1167E+04  1.4575E+05
534001.E-02  0.0000E+00  5.2000E+04  1.7383E+05
540001.E-02  0.0000E+00  5.4583E+04  1.6550E+05
546001.E-02  0.0000E+00  4.7417E+04  1.2783E+05
552001.E-02  0.0000E+00  4.0667E+04  1.2442E+05
558001.E-02  0.0000E+00  2.7833E+04  8.7916E+04
564001.E-02  0.0000E+00  2.3000E+04  7.5416E+04
570001.E-02  0.0000E+00  1.8750E+04  5.7417E+04
576001.E-02  0.0000E+00  1.4417E+04  5.6250E+04
582001.E-02  0.0000E+00  1.6167E+04  5.4000E+04
588001.E-02  0.0000E+00  1.8583E+04  5.4250E+04
594001.E-02  0.0000E+00  1.4583E+04  5.0417E+04
600001.E-02  0.0000E+00  8.1667E+03  2.6000E+04
