====== Fe (500) into Layer 1                    =======
        SRIM-2013.00
==================================================
      ION and final RECOIL ATOM Distributions     
 See  SRIM Outputs\TDATA.txt for calculation details
==================================================
See file :  SRIM Outputs\TDATA.txt   for details of calculation
 Ion    = Fe   Energy = 500  keV
============= TARGET MATERIAL ======================================
Layer  1 : Layer 1
Layer Width =     6.E+03 A   Layer # 1- Density = 8.481E22 atoms/cm3 = 7.865 g/cm3
  Layer # 1- Fe = 100  Atomic Percent = 100  Mass Percent
====================================================================
 Total Ions calculated =20.00
 Ion Average Range =   191.3E+01 A   Straggling =   332.7E+00 A
 Ion Lateral Range =   534.3E+00 A   Straggling =   717.4E+00 A
 Ion Radial  Range =   809.2E+00 A   Straggling =   444.2E+00 A
====================================================================
 Range Skewne- = 004.5055  &= [-(X-Rp)^3]/[N*Straggle^3]
 Range Kurtosis = -036.8718  &= [-(X-Rp)^4]/[N*Straggle^4]
 Statistical definitions above are those used in VLSI implant modelling.
====================================================================
=================================================================
  Table Distribution Units are >>>  (Atoms/cm3) / (Atoms/cm2)  <<<  
=================================================================
   DEPTH         Fe         Fe    
   (Ang.)       Ions     Tgt. Atoms
-----------  ----------  ----------
600100.E-04  0.0000E+00  5.9583E+07
120010.E-03  0.0000E+00  9.4166E+07
180010.E-03  0.0000E+00  7.5000E+07
240010.E-03  0.0000E+00  1.9183E+08
300010.E-03  0.0000E+00  1.5650E+08
360010.E-03  0.0000E+00  1.7717E+08
420010.E-03  0.0000E+00  1.8225E+08
480010.E-03  0.0000E+00  2.3475E+08
540010.E-03  0.0000E+00  2.5375E+08
600010.E-03  0.0000E+00  3.0991E+08
660010.E-03  0.0000E+00  4.0476E+08
720010.E-03  0.0000E+00  2.8883E+08
780010.E-03  8.3333E+04  3.5042E+08
840010.E-03  0.0000E+00  1.8367E+08
900010.E-03  8.3333E+04  2.4183E+08
960010.E-03  0.0000E+00  2.6958E+08
102001.E-02  0.0000E+00  2.7350E+08
108001.E-02  0.0000E+00  2.8150E+08
114001.E-02  8.3333E+04  3.5309E+08
120001.E-02  1.6667E+05  2.7566E+08
126001.E-02  0.0000E+00  2.8875E+08
132001.E-02  0.0000E+00  1.9716E+08
138001.E-02  8.3333E+04  2.6408E+08
144001.E-02  0.0000E+00  9.5833E+07
150001.E-02  0.0000E+00  8.0000E+07
156001.E-02  0.0000E+00  1.2050E+08
162001.E-02  0.0000E+00  9.4916E+07
168001.E-02  8.3333E+04  1.7983E+08
174001.E-02  0.0000E+00  2.4816E+08
180001.E-02  0.0000E+00  2.6708E+08
186001.E-02  8.3333E+04  3.9085E+08
192001.E-02  8.3333E+04  2.4450E+08
198001.E-02  1.6667E+05  2.2366E+08
204001.E-02  0.0000E+00  3.0933E+08
210001.E-02  0.0000E+00  2.7283E+08
216001.E-02  1.6667E+05  2.4791E+08
222001.E-02  1.6667E+05  2.7891E+08
228001.E-02  2.5000E+05  2.3375E+08
234001.E-02  0.0000E+00  1.7767E+08
240001.E-02  1.6667E+05  1.3500E+08
246001.E-02  8.3333E+04  1.5900E+08
252001.E-02  0.0000E+00  7.9583E+07
258001.E-02  0.0000E+00  5.1667E+06
264001.E-02  0.0000E+00  5.5833E+06
270001.E-02  0.0000E+00  0.0000E+00
276001.E-02  0.0000E+00  0.0000E+00
282001.E-02  0.0000E+00  0.0000E+00
288001.E-02  0.0000E+00  0.0000E+00
294001.E-02  0.0000E+00  0.0000E+00
300001.E-02  0.0000E+00  0.0000E+00
306001.E-02  0.0000E+00  0.0000E+00
312001.E-02  0.0000E+00  0.0000E+00
318001.E-02  0.0000E+00  0.0000E+00
324001.E-02  0.0000E+00  0.0000E+00
330001.E-02  0.0000E+00  0.0000E+00
336001.E-02  0.0000E+00  0.0000E+00
342001.E-02  0.0000E+00  0.0000E+00
348001.E-02  0.0000E+00  0.0000E+00
354001.E-02  0.0000E+00  0.0000E+00
360001.E-02  0.0000E+00  0.0000E+00
366001.E-02  0.0000E+00  0.0000E+00
372001.E-02  0.0000E+00  0.0000E+00
378001.E-02  0.0000E+00  0.0000E+00
384001.E-02  0.0000E+00  0.0000E+00
390001.E-02  0.0000E+00  0.0000E+00
396001.E-02  0.0000E+00  0.0000E+00
402001.E-02  0.0000E+00  0.0000E+00
408001.E-02  0.0000E+00  0.0000E+00
414001.E-02  0.0000E+00  0.0000E+00
420001.E-02  0.0000E+00  0.0000E+00
426001.E-02  0.0000E+00  0.0000E+00
432001.E-02  0.0000E+00  0.0000E+00
438001.E-02  0.0000E+00  0.0000E+00
444001.E-02  0.0000E+00  0.0000E+00
450001.E-02  0.0000E+00  0.0000E+00
456001.E-02  0.0000E+00  0.0000E+00
462001.E-02  0.0000E+00  0.0000E+00
468001.E-02  0.0000E+00  0.0000E+00
474001.E-02  0.0000E+00  0.0000E+00
480001.E-02  0.0000E+00  0.0000E+00
486001.E-02  0.0000E+00  0.0000E+00
492001.E-02  0.0000E+00  0.0000E+00
498001.E-02  0.0000E+00  0.0000E+00
504001.E-02  0.0000E+00  0.0000E+00
510001.E-02  0.0000E+00  0.0000E+00
516001.E-02  0.0000E+00  0.0000E+00
522001.E-02  0.0000E+00  0.0000E+00
528001.E-02  0.0000E+00  0.0000E+00
534001.E-02  0.0000E+00  0.0000E+00
540001.E-02  0.0000E+00  0.0000E+00
546001.E-02  0.0000E+00  0.0000E+00
552001.E-02  0.0000E+00  0.0000E+00
558001.E-02  0.0000E+00  0.0000E+00
564001.E-02  0.0000E+00  0.0000E+00
570001.E-02  0.0000E+00  0.0000E+00
576001.E-02  0.0000E+00  0.0000E+00
582001.E-02  0.0000E+00  0.0000E+00
588001.E-02  0.0000E+00  0.0000E+00
594001.E-02  0.0000E+00  0.0000E+00
600001.E-02  0.0000E+00  0.0000E+00
